Fully Automatic Pneumatic Nanoimprint System

Product Overall

The InSEM® HT (high temperature) nanoindentation system measures hardness, modulus and stiffness at high temperature by independently heating both the tip and sample in a vacuum environment. The InSEM HT is compatible with scanning electron microscope (SEM) and focused ion beam (FIB) chambers, or standalone vacuum chambers. The accompanying InView software helps advanced researchers develop novel experiments. Scientific publications show that InSEM HT results match well to traditional large-scale high temperature nanoindentation test data. The combination of wide temperature range capability and low cost of ownership makes the InSEM HT nanoindentation system a valuable tool in materials development research programs.

Basic information

The InSEM HT high temperature nanoindentation test system allows independent tip and sample heating in a vacuum environment, and is compatible with many SEM/FIB chambers or standalone vacuum chambers. With temperatures ranging up to 800°C, extreme temperature conditions can be simulated in situ in order to produce consistent, reliable test data. Single-crystal tungsten carbide tips on a molybdenum holder are optimized for use in high temperature test applications, and are available in several geometries.

Features

• InForce 50 actuator with tip heating for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips
  
• Sample high temperature heating, up to 800°C with 10mm sample-size and vacuum-compatible sample mounting system
  
• InQuest high speed controller electronics with 100kHz data acquisition rate and 20µs time constant
  
• XYZ motion system for sample targeting
  
• SEM video capture for synchronized SEM images with test data
  
• Unique software-integrated tip-calibration system for fast, accurate tip calibration
  
• InView control and data review software with Windows® 10 compatibility and method developer for user-designed experiments

Applications

• High temperature nanoindentation testing
  
• Hardness and modulus measurements (Oliver-Pharr)
  
• Continuous stiffness measurement
  
• High speed material property maps
  
• Creep measurement
  
• Strain rate sensitivity

Industries

• Universities, research labs and institutes
  
• Aerospace
  
• Automotive manufacturing
  
• Hard coatings
  
• Nuclear energy
  
• Military/defense

The options for the InSEM® HT
(High Temperature) Nanoindenter

Continuous Stiffness Measurement (CSM)
The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced options, including the ProbeDMA method for storage and loss modulus measurements and AccuFilm substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver unparalleled ease of use and data quality.

InForce 50 Actuator
The InForce 50 actuator performs nanomechanical tests with forces up to 50mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures one-degree of freedom harmonic motion so that force and displacement are controlled along a single axis. The tips are interchangeable with the entire line of InForce actuators. The InForce 50 actuator is compatible with the CSM, NanoBlitz, ProbeDMA, biomaterials, sample heating, scratch, wear and ISO 14577 testing options.

InForce 1000 Actuator
The InForce 1000 actuator performs nanomechanical tests with forces up to 1000mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures one-degree of freedom harmonic motion so that force and displacement are controlled along a single axis. The tips are interchangeable with the entire line of InForce actuators. The InForce 1000 actuator is compatible with the CSM, NanoBlitz, sample heating, scratch, wear and ISO 14577 testing options.

NanoBlitz 3D
NanoBlitz 3D utilizes the InForce 50 or InForce 1000 actuator to generate 3D maps of measurements for high-E (> 3GPa) materials with a Berkovich tip. NanoBlitz performs indents at < 1s per indent, up to 90,000 indents (300x300 array), and will provide Youngs modulus, hardness, and stiffness at a specified load for each indent in the array. This large number of tests allows increased statistical accuracy, and includes histogram charts to show multiple phases or materials. NanoBlitz 3D also provides with visualization software and data handling capabilities.

AccuFilm Thin Film Method Pack
The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates as well as soft films on hard substrates.

DataBurst
DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates > 1kHz for measuring high strain step loads, pop-in and other high speed events. InSEM HT systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software
InView offers an extremely powerful and intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test with the InSEM HT. KLA exclusively offers this capability.

Indenter Tips and Calibration Samples
A wide variety of sharp indenters are available, such as Berkovich, cube corner and Vickers, as well as flat punches, sphere punches, and other geometries. Standard reference materials and calibration standards are also available for the entire product line.