• Inductively Coupled Plasma (ICP) technology to generates
plasma with much higher particle density than traditional
capacitively coupled technology.
• The high concentration of oxygen radicals generated can
efficiently remove surface hydrocarbon contami-nants on the
sample.
• "Downstream" cleaning method has no damage to the
sample and preserves the original surface morphology.
• Operating pressure range:0.01-500 Pa, will not damage the
high vacuum of electron microscope sample chamber.
• Integrated software control,one-button operation without
excessive user operation.
• Integrates Downstream plasma, ultravioletirradiation, and
heating vacuum detach-ment into one machine, cleaning
source can be switched at any time.
• Suitable for cleaning samples for various scanning electron
microscopes, focused on beam microscopes,and
transmission electron microscopes.
• High-resolution touch screen operation supports remote
control in WiFi environ-ment.
• Can be used as a constant temperature vacuum sample
storage cabinet.
• Hydrophilization treatmentsignificantly improves the
wettability.
• Efficiently removes surface hydrocarbon contaminants
from scanning/transmission electron microscope samples.
• The sample chamber can be pumped to high vacuum
forvacuum storage ofsamples.
• Inductively Coupled Plasma (lCP) cleaning source has
no pollution to the samples.
• High-resolution touch screen,one-button operation.








