PSD, PSDP & Thermal Series เครื่องทำความสะอาดผิวด้วยระบบ UV Ozone สำหรับงานไมโคร–นาโน

เครื่อง UV Ozone Cleaner รุ่น PSD, PSDP และ Thermal Series สำหรับทำความสะอาดพื้นผิว wafer, glass, silicon และวัสดุอิเล็กทรอนิกส์ เพิ่มประสิทธิภาพ surface energy ก่อนเคลือบหรือประกอบชิ้นงาน


Product Description
Specifications

Product Overview

Product Name: UV-Ozone Cleaning Systems
The UV-Ozone Cleaning System is primarily designed for the electronics and semiconductor industry, as well as applications in biology, chemistry, physics, and materials science research laboratories. To meet the high-quality and reproducible requirements of industrial research institutions, Novascan has developed the PSD/PSDP series of UV-Ozone products. These products offer excellent performance for applications including:

  • Molecular-level cleaning
  • Surface oxidation
  • Surface modification
  • Ozone decomposition
  • Enhanced surface wettability
  • AFM sample cleaning
  • Decontamination

Product Series

1.PSD-UV Series: Provides basic digital flowrate control

2.PSDP-UV Series: Offers flow control functionality with PID temperature control

3.PSDP-UVT Series: Features PID control with added heating capabilities and process enhancement options

Series Features

PSD-UV Series Features

  • Digital control platform with 4×4 inch or 12×16 inch cleaning chamber
  • Equipped with a non-mercury UV lamp that provides high cleaning efficiency
  • Four-inch sample size maximum
  • System includes output exhaust port
  • User-friendly simple digital control interface
  • Easy-to-operate dual-button controls
  • Programmable working times: 15, 30, 60, 120 minutes
  • Process can be stopped at any time during operation
  • System provides high temperature selection
  • Economical design makes the PSD series a popular choice
  • Easy installation and operation

This UV-Ozone cleaning system combines advanced technology with user-friendly operation to provide effective surface cleaning and modification capabilities for research and industrial applications.

PSD Pro Series

The PSDP series is a research-grade UV-Ozone cleaning system with excellent adaptability. It can accommodate various molecular-level cleaning applications and can operate directly in a vacuum environment or through a passage where gas flow generates ozone. The programmable digital controller allows for systematic parameter settings to ensure consistent and optimized cleaning results.

Key Features

  • Programmable digital controller
  • Digital display with timer
  • Easy to upgrade with heating option
  • Executable start and stop commands
  • Internal memory to store frequently used parameter settings

This through-flow system provides powerful process control capabilities!

PSDP-UVT Pro Series

The PSDP-UVT Pro series features PID-controlled sample heating capabilities and is suitable for electronics, semiconductors, optical research fields, and UV lamp production. It can effectively self-clean silicon, oxides, glass, metals, ceramics, and other materials. Like other products in the PSDP-UVT series, it can utilize UV cleaning, UV modification, and AFM sample preparation as well as ozone treatment.

The heating function of the PSDP-UVT Pro series can accelerate multiple application cleaning processes, making it more versatile and efficient for various cleaning requirements.

The system combines advanced temperature control with proven UV-Ozone technology to provide a comprehensive cleaning solution for research and industrial applications.

Product Features

  • Digital temperature control with heating up to 150 degrees
  • PSDP-UVT capable of removing organic and foreign matter
  • UV lamp wavelength range from 185nm to 254nm
  • Generates ozone molecules for decomposition
  • Can operate in vacuum or low-pressure gas environments
  • Uses clean compressed air for operation


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