Compact active isolation system for normal SEM (Active Vibration Isolator)

Product Overview

The pneumatic passive anti-vibration system, which is widely used to block the vibration applied around the electron microscope's installation site, amplifies the vibration due to the resonance phenomenon in low-frequency region. Even in the case of a normal SEM, which is relatively robust against vibration disturbance, the resonance phenomenon in low-frequency region may affect IEST VC-E Class's vibration environment, the minimum vibration state for optimal operation of an electron microscope.

VAIS-CMT is a full active anti-vibration system incorporating 3 axis-6 degree of freedom control technology to eliminate pneumatic passive vibration isolator's resonance issue.
Since a metal coil spring frame supports it, VAIS-CMT needs no compressed air supplier. The lower height of VAIS-CMT improves inconvenience that the pneumatic passive anti-vibration system causes. With a competitive price, it will be the best anti-vibration solution for normal SEMs.

Basic Information

Application Direction

1. Application note
(1) The pneumatic passive anti-vibration system, widely used in heavy-load micro-analysis with a high center of gravity, has a resonance problem occuring at frequencies below 10Hz, which makes it difficult to archieve the target resolution of the equipment.

(2) VAIS-CMT eliminates the resonance problem and completely blocks the vibration disturbance transmitted from the surrounding vibration sources.

(3) By applying a coil spring support frame, it does not require a compressed air supplier and has a lower height compared to the pneumatic passive isolator, thus reducing the inconvenience of operating the target instruments

(4) VAIS-CMT has significantly superior isolation performance, conveniences and price competitiveness

Target Instruments

 2.Target Instruments

• Normal SEM
  
• Probe Station
  
• 3D Surface Measurement System
  
• High-Precision Optical Microscope
  
• Nano Indentation System
  
• Nano Measurement / Analysis Instruments