Mesin Pemusnah Ozon Kepekatan Tinggi (High Concentration Ozone Destroyer)
High Concentration Ozone Destroyer designed for efficient decomposition and removal of excess ozone in semiconductor and industrial processes. Ideal for cleanroom environments, ensuring safety and preventing ozone accumulation in advanced manufacturing systems.
Product Description
Specification
Functional Structure
Application direction
- CVD
- ALD
- MOCVD
- Ashers
- Wet tools
Ozone Destroyer
Ozone Destruction System
Ozone Removal System
Industrial Ozone Destroyer
Sistem Pemusnahan Ozon
Mesin Penyingkiran Ozon
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