Novascan PSD-UV, PSDP-UV and PSDP-UVT

UV/Ozone Systems

UV/Ozone Systems

With thousands of users worldwide Novascans PSD and PSDP series UV Ozone systems are

proven instruments that work. Contact Novascan today for help in selecting the proper

system for your application.

Applications

• Atomic surface cleaning

• Wafer and thin film preparation

• Resist stripping

• Polymer bonding (เช่น PDMS, COC, PS)

• Micro- and nano-patterning

• AFM/SEM probe cleaning

• Chemical surface modification

• Sterilization

• Metal bonding preparation

Instrument Specifications

The PSD and PSDP systems are similar in performance and dimensions, but vary in controller

capability, upgradability and heated stage options.

The PSD series instruments are digitally controlled benchtop systems that are available in sizes ranging from 4x4 to 20x20. These systems feature a powerful UV grid system with reflector and adjustable height stage for optimal sample positioning and performance. In/Out Gas Ports are available on the 4x4 and larger systems. The system is controlled by a convenient preset controller that makes operation a breeze.

Features:

• Preset Digital Controller
• Convenient 2 button operation is convenient and simple.
• Automated 15, 30, 45, 60, 90, 120 minute process time
• Process cycle can be manually interrupted at any time
• System cannot be easily upgraded with a temperature stage
• Cost saving yet functional design makes this system a popular choice
• Very simple setup and use
• A host of valuable options are available for the PSD, PSDP and PSDP-UVT to match all of your application needs. (Please see Appendix B for an Options List.)

The PSDP series instruments are research grade UV/ozone cleaning systems that offer maximum versatility for molecular or ganic stripping and numerous other applications.Operate in ambient air or flow oxygen through one of two standard gas ports for increased ozone production. A programmable digital controller handles the system processing ensuring accurate timing regimes and optimum scouring parameters.

Features:

• Programmable Digital Controller for more operation control
• Digital Count down display
• Easily upgradeable to the temperature controlled system
• Function pause and interrupt capability
• A powerful system that offers enhanced process control
• Internal Memory for previous settings
• A host of valuable options are available for the PSD, PSDP and PSDP-UVT to match all of your application needs. (Please see Appendix B for an Options List.)

The PSDP-UVT takes the power of the PSDP UV to a new level with the addition of a temperature controlled stage designed to maximize the destruction of molecular organic materials. A digital controller with PID feedback loop accurately maintains stable temperatures of up to 150 degrees Celsius. (200C available as an option)

Features:

• Identical to the PSDP, but factory installed with the temperature stage.
• Offers maximum potential and flexibility.
• Ideal for multiple user environment
• A host of valuable options are available for the PSD, PSDP and PSDP-UVT to match all of your application needs. (Please see Appendix B for an Options List.)

How the PSD and PSDP Series Work

The PSD and PSDP Series Instruments destroy organic molecules (contaminants) by producing the proper ratio of high energy ultraviolet light at wavelengths of 185 nm and 254 nm. The 185 nm line drives molecular oxygen O2 to form the energized O3 Ozone radical. The 254 nm line simultaneously excites the organic molecules on the surface making them highly susceptible to destruction by the Ozone radical.

Since Ozone has a short half life and is also destroyed by the 254 nm line, an adjustable sample stage is used to properly position the sample relative to the lamp for optimal performance. The PSD and PSDP destroyed contaminants are then released in the form of CO2 and H2O vapor, and remaining Ozone returns to the state of molecular

Oxygen O2.