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Product Overview

Lumina Optical Surface Defect Analyzer, an innovative laser scanning device capable of detecting thin film defects as thin as 0.5nm. Combined with the basic principles of elliptical polarization, reflectance measurement, surface slope and scattering measurement, the Wafer surface is inspected for residual foreign matter, surface and subsurface defects, shape variation, and film thickness uniformity in a non-ring-breaking manner.

Application Direction

Surface inspection of glass, semiconductors, and optoelectronic materials is possible. It is a powerful tool for quality control and yield improvement in the R&D/production process by detecting transparent materials such as SiC, GaN, sapphire, and glass, as well as opaque substrates such as Si, gallium arsenide, and indium phosphide.

Technical characteristics

1. Cost-effective comprehensive nanoscale defect detection
2. Practical: It can be used for fragile and ultra-thin samples
3. Universal: Scan any shape of flat sample 300mm×300mm
4. Fast: 210s full surface scanning 150mm chip
5. Flexible: Can be used on transparent (glass), semiconductor, and metal substrates
6. Convenient: Place the sample and press the scan button
7. Sensitivity: Semiconductors - up to 70nm particle sensitivity (PSL) Glass - 150nm particle sensitivity