What is Maskless Lithography?
We at Hong Kong NTI will explain more about the working principles and mechanisms, applications, benefits of use, and introduce you to Nanofabrication and Nanoimprint as well.
Basic Working Principles and Mechanisms of Maskless Lithography Technology
The working principles and mechanisms of Maskless Lithography technology primarily use radiation projection, such as UV radiation, electron beams, or ion beams, combined with equipment installed on microscopes. This allows pattern production on materials without using template plates, reducing complex processes and lowering template plate costs compared to conventional Lithography systems that use template plates.What Can Maskless Lithography Be Used For?
Micro and nano-level manufacturing processes require efficient tools, making Maskless Lithography a highly suitable tool, especially in various industries such as:- Research and Development (R&D): Suitable for prototyping and experimentation requiring multiple changes to micro and nano-level patterns for standardized experimental results.
- Semiconductor Industry: Used for creating electrical circuit patterns on computer chips (IC) and electronic devices.
- Nano-scale Electromechanical Systems (NEMS) and Micro-scale (MEMS): Used for manufacturing very small structures and devices.
Benefits of Using Maskless Lithography
Using Maskless Lithography in micro and nano-level work provides numerous benefits in many aspects, such as:
- A Tool with Greater Flexibility: Can easily and quickly change patterns or designs through software without requiring new templates or photomasks.
- Greater Time and Cost Savings: Helps reduce steps and expenses related to producing new photomasks, which take a long time and are expensive.
- High Resolution: Can create very small structures at the nanometer level.
What is the CIL Series Compact Interference Nanopatterning Tool?
CIL is a nano-structure patterning tool that uses Interference Lithography technology or light interference to create nano-level patterns on materials. It is a system designed to be compact, cost-effective, and allows easier adjustment of pattern frequency.
Key Features of CIL Include:
- Can create various 1D and 2D patterns such as straight lines, nano dots, grid shapes, and checkerboard patterns.
- Supports pattern creation on surfaces up to several centimeters wide in a single exposure.
- Pattern resolution achievable below 100 nanometers with minimum line widths of approximately 40 nanometers.
- Combined with high aspect ratio patterns (height to width), suitable for continuous process work such as etching or surface coating.
- Control system using PLC to manage exposure steps with an easy-to-use interface that can be learned quickly.
- Modules for rapid pattern modification and high-precision stages to enhance efficiency in producing various patterns.
What Does Nanofabrication Include?
Nanofabrication is a process or technique used to create materials, structures, or devices at the nanometer level. It can take large materials and carve or reduce them or define smaller patterns, such as Maskless Lithography, Photolithography, Electron Beam Lithography, and Nanoimprint as well.
What is Nanoimprint?
Nanoimprint Lithography (NIL) is a simple, low-cost Nanolithography process that provides high resolution in producing nanometer-scale patterns.
Working principle: Uses a mold with nanometer-scale patterns pressed onto a layer of imprint resist, which is a monomer or polymer substance on the surface.
After pressing, curing is performed using heat or UV light to harden the imprint resist and maintain the shape according to the mold.
After that, the mold is lifted off, resulting in the desired nano patterns.
Applications: Used in semiconductor manufacturing, display technology (OLED, Micro-LED), sensors, and biological devices.
Hong Kong NTI Distributes Lithography Equipment
Because Lithography equipment, including Maskless Lithography, is crucial both in laboratories and advanced micro and nano-level industries, we at Hong Kong NTI provide services and distribute high-performance equipment from leading industry brands. With over 16 years of global expertise, we deliver equipment and services for efficient research and development.
If interested, you can contact us at: 725 S-Metro Building, 20th Floor, Sukhumvit Road, Khlong Tan Nuea, Watthana, Bangkok
Phone: 02-821-5278
Email: info@hknti.com
