SOTOMD PRO Series Modular Passive Vibration Isolation System
The SOTOMD PRO Series Modular Passive Vibration Isolation System delivers stable, high-load vibration isolation for SEM, AFM, wafer inspection, and nano-scale measurement equipment in semiconductor fabs and research laboratories.
Product Description
Product Overview
TableTtop Active Vibration Control Systems
Advanced Performance
- No Piezo Electric Elements in use
- Higher Actuators stroke
- Practically unlimited life time for sensors and motors
- Significantly lower life time cost
Multi Layer Vibration Isolation Structure
3 independent layers of active vibration control 2 layers of passive.
Features
- Highly Damped Step Respond
- Simple Installation
- Ability to support Massive Machines
- Almost no amplification on Low
Frequencies
- Significant reduction on Frequencies
higher than 10Hz - Vibration Isolation Performance
- ~30-40 dB reduction at > 20Hz
- Settling time < 0.3sec
- In lab working conditions
Device
- Smart Device with IOT capabiliti
- AI/ML Technology
- Automatic Adjustment in Real Time
SOTOMD PRO Passive Isolator
Modular Vibration Isolation Platform
Passive Anti-Vibration Base
Precision Isolation Module
passive vibration isolation for SEM
modular vibration isolator system
semiconductor passive anti vibration
AFM vibration isolation base
precision lab vibration control
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