ARISMD PRO Series Modular Active Vibration Isolation System
The ARISMD PRO Series Modular Active Vibration Isolation System delivers real-time low-frequency vibration suppression for SEM, AFM, wafer inspection, and nano-scale metrology equipment in semiconductor fabs and advanced research laboratories.
Product Description
Product Overview
TableTtop Active Vibration Control Systems
Advanced Performance
- No Piezo Electric Elements in use
- Higher Actuators stroke
- Practically unlimited life time for sensors and motors
- Significantly lower life time cost
Multi Layer Vibration Isolation Structure
3 independent layers of active vibration control 2 layers of passive.
Features
- 6 degree of freedom
- Active gain starting from 0.5Hz
- Built In Artificial Intelligence
- Active Vibration Control Performance
- ~ 8dB reduction at 1Hz
- ~20dB reduction at 3Hz
- Settling time < 0.1sec
- In lab working conditions
- Software adjustable active bandwidth
- Built in real time diagnostic tools
- 2 channels Spectrum Analyzer
- 8 channels Oscilloscope
- Input Voltage AC 80-260V/50-60Hz
Device
- Smart Device with IOT capabiliti
- AI/ML Technology
- Automatic Adjustment in Real Time
ARISMD PRO Active Isolator
Modular Active Vibration Control Platform
Active Anti-Vibration Base
Precision Active Isolation Module
active vibration isolation for SEM
low frequency vibration control system
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