Ellipse Measurement System

Product Overview

Based on the modulation of double rotation compensators, the fast measurement of 16 elements of the whole Muller matrix is realized

It is used for the characterization of isotropic/anisotropic thin film film thickness, optical constants, and nanostructures

Core technology

Dual rotation compensator synchronous control technology
Wide spectrum achromatic compensator technology,
Low-speckle detection technology Instrument precision calibration algorithm
Fully automatic angle change and focus technology, one-key fast measurement
Wizard interactive man-machine fruit surface, convenient software operation experience
Abundant material database and algorithm model library, strong data analysis capabilities

Technical Characteristics

Mueller Matrix Ellipsomemeter

Based on the modulation of double rotation compensators,

the fast measurement of 16 elements of the whole Muller matrix is realized

It is used for the characterization of isotropic/anisotropic thin film film thickness, optical constants, and nanostructures.

High-Precision Spectroscopic Ellipsometer

It can realize scientific research/enterprise-level high-precision and rapid spectral ellipsometry measurement, support multi-angle, low-spot and other high-compatibility flexible configuration, multi-function module customized design, and is widely used in optical communication/OLED/TP/transparent conductive film and other applications involving transparent substrate coating measurement and characterization

High-Precision Spectroscopic Ellipsometer

Technical Specifications:

App targeting

Versatile

Automatic type

Detection type

Economical

Basic functions

Psi/Delta, N/C/S, R/T spectrum, etc.

Psi/Delta, N/C/S, R spectrum, etc.

Analyze the spectra

3801000nm (supports expansion to 1931650 nm)

3801000nm

2451000nm

400800nm

Time for a single measurement

less than or equal to 15s

Repeatability measurement accuracy

0.01nm

0.05nm

Spot size

Large light spots 24mm, shimmer spots 200um/100um

200um/100um

50um/100um

Large spot 24mm

Refractive index repeatability

0.0005

0.001

Range of angle of incidence

4590° (5° Step)

4590°

65°

Angle of incidence adjustment

Manual angle change

Automatic angle change

Fixed angle

How to find focus

Manual focus finding

Autofocus

Manual focus finding

Mapping trips

Not supported

100×100mm (Optional)

300×300mm (Optional)

Not supported

Sample sizes are supported

Up to 180mm

Up to 200mm

Up to 300mm

Up to 160mm

The repeatability accuracy index is 30 repeatability measurements for 100nm SiO2/Si standard samples.
The naming of the Mapping model is related to the size of its stroke, and supports size customization.
The specific technical parameters of the instrument need to be related to the actual functional modules and accessories, and the data in the table are for reference only.