Off-Line Confocal Micro Raman & Photoluminescence (PL) Spectroscopy System for QC, QA, Failure Analysis & R&D

Product Overview

Analyze materials with high resolution using this advanced system. It features versatile lasers, high sensitivity, confocal imaging, and powerful software. Ideal for research and industry.

Applications

Common inspection and measurement applications include:
Qualitative and quantitative analysis (foreign matter/residue)
Surface residue stress (CMP stress changes/cutting/baking)
Real-time monitoring (electrochemical rxns/chemical conc. monitoring/catalytic rxns/ material changes)
Structural changes (molecular changes/functional group changes/structural strength analysis)

Application direction

Common inspection and measurement applications include:

• Qualitative and quantitative analysis (foreign matter/residue)
  
• Surface residue stress (CMP stress changes/cutting/baking)
  
• Real-time monitoring (electrochemical rxns/chemical conc. monitoring/catalytic rxns/ material changes)
  
• Structural changes (molecular changes/functional group changes/structural strength analysis)

Highlights

Convenience highlights include:

• Localization (recognized by major customer)
  
• Customer made & automation
  
• Unlimited detection materials (from NIR to UV).
  
• Penetration test (data collection at different depths)
  
• Direct testing (no sample preparation required)
  
• Feature spectrum database (acc. the largest 80K+ pcs)