Table Top Active Anti-Vibration System

Product Overview

Developed in 2007, VAIS-AMT series is Korea's first commercialized tabletop active anti-vibration system. It satisfies IEST's VC-G class of environment for anti-vibration system to accommodate Atomic Force Microscope (AFM), a device especially vulnerable to low-frequency vibration disturbance.

VAIS-AMT also removes resonance phenomenon of passive isolation systems with easier installation and operation procedures. Since the commercialization, VAIS-AMT's excellent capabilities and competitive price have been recognized by worldwide AFM manufacturers and utilized in various nano-measurement instruments.

Basic Information

Application Direction

1. Application Note
(1) VAIS-AMT series was developed to accommodate AFM/SPM, which requires a long time to get an optimal image. The series' capabilities to create a stable vibration environment were thoroughly verified by several AFM manufacturers worldwide and are utilized in various sites.

(2) With experinces in vibration-sensitive AFM, VAIS-AMT is expanding its scope into various microscopes requiring high-accuracy measurement, including high-end optical microscope, 3D-surface optical profiler, mini-SEM, nano-indentation.

(3) By eliminating vibration amplification(resonance) issue of pneumatic passive isolation systems and providing a competitive price, the VAIS-AMT series will strive to provide an ideal vibration environment for all analysis devices requiring nano-scale measurements.

Target Instruments

2.Target Instruments

• Atomic Force Microscope (AFM)
  
• Scanning Probe Microscope (SPM)
  
• 3D Surface Measurement System
  
• Tabletop SEM (Mini-SEM)
  
• High-precision Optical Microscope
  
• Nano Indentation System
  
• Nano Measurement / Analysis Instruments