Easy NanoScan
Desktop Scanning Electron Microscope (SEM)
Imaging System
Item
Specification
Resolution
5 nm @ 30 kV (SE), 10 nm @ 30 kV (BSE)
Electron Gun
Pre-aligned tungsten filament
Detectors
Secondary Electron (SE), Backscattered Electron (BSE)
Magnification
10× to 200,000×
Accelerating Voltage
1 to 30 kV
Sample Chamber
Item
Specification
Working Distance
5 to 40 mm
Stage Travel
X, Y: 40 mm; Z: 540 mm; T: 90° to +90° (manual); R: 360°
Stage Control
X, Y, Z (motorized)
Maximum Sample Size
80 mm (D) × 40 mm (H)
Navigation Mode
Optical image
Vacuum System
Item
Specification
Pump Down / Vent Time
Vacuum: < 90 s; Venting: < 10 s
Vacuum Modes
High vacuum (< 9 × 10³ Pa) / Low vacuum
Vacuum Pumps
Motorized valve system (oil-free); Fully automatic vacuum system; Turbo molecular pump and rotary vane pump
Control System
Item
Specification
Workstation
All-in-one workstation based on Windows 11 with 24" display
Display Modes
Focus mode: 320 × 240 pixels; Preview mode: 800 × 600 pixels; Slow scan mode: for preview and focus; Image mode: up to 3200 × 2400
Image Formats
JPEG, TIFF, BMP, PNG
Anti-vibration System
Optional
Chamber Camera
Optional
Elemental Analysis (EDS)
Optional
Simple Operation Mouse Control Only
Key Software Capabilities
Marks sample positions visually
Optional optical image overlay
Navigation experience similar to Google Maps
Quick switching between different imaging modes
(TV, focus, preview, image acquisition)
Resolution can be selected with a single click.
Independent SE and BSE imaging
Compositional contrast using BSE
SE + BSE image merging supported
Key Software Capabilities
Item
Specification
Model
Minicoater
Ultimate Vacuum
< 2 Pa
Pump Down Time
< 2 min
Coating Material
Gold / Platinum
Chamber Size
Ø120 mm (D) × 110 mm (H)
Sample Stage Size
Ø50 mm (D)
Target Size
Ø50 mm (D)
Coating Time
Adjustable
Vacuum Pumping Speed
> 4 m³/h
Elemental Analysis (Any EDS)
Easy NanoScan supports elemental analysis using any EDS system from major manufacturers.
Users can freely choose their preferred EDS brand, with full compatibility and seamless integration.
Compatible EDS Brands
The system ensures 100% compatibility with third-party EDS solutions.
Ion Coater
Fast Metal Coating on Samples
The ion coater improves image contrast and brightness by enhancing surface conductivity.
It deposits a thin metal layer on the sample surface to achieve better imaging performance.
Key Features