AFM-in-SEM
for In-Situ Correlative Microscopy
LiteScope
We introduce the game-changing Atomic Force
Microscope (AFM) for seamless integration into
Scanning Electron Microscope (SEM), which
unlocks new possibilities for in-situ correlative
microscopy
Why AFM-in-SEM?
Scanning electron microscopy and atomic
force microscopy are the two most used and
complementary techniques for sample analysis
in the sub-nanometer range. The integration of
AFM into SEM merges the strengths of both
techniques, resulting in extremely time-efficient
workflow and enabling complex sample analysis
that was difficult or practically impossible
by conventional, separate AFM and SEM
instrumentation.
Key technology benefits
Correlative multimodal
sample analysis
Cutting-edge CPEM technology
allows the simultaneous
acquisition of AFM and SEM
data and their seamless
correlation
In-situ sample
characterization
In-situ conditions inside the SEM
ensure sample analysis at the
same time, in the same place
and under the same conditions.
Precise localization
of the region of interest
Extremely precise and time
saving approach uses SEM to
navigate the AFM tip to the
region of interest, enabling its
fast & easy localization.
We merge the forces of AFM and SEM
AFM
- Precise 3D topography
- High resolution (to sub-nm)
- Mechanical properties
- Electrical properties
- Magnetic properties
SEM
- Fast 2D imaging
- Viewfield range (mmnm)
- Surface modification
- Elemental composition
- Crystal structures
How does it work?
On the sample, the electron beam points close
to the AFM tip with a constant offset. They both
remain static, while the sample is scanned with the
LiteScopes piezo scanner.
This way, data from both microscopes can be
acquired at the same time, in the same place,
and under the same conditions.
Application areas
LiteScope offers users unprecedented
possibilities in sample analysis and advanced
3D correlative imaging with unparalleled
accuracy of image alignment. The versatility of
LiteScope proves its applicability in a variety of
fields such as Material Science, Nanotechnology,
Semiconductors, Solar cell development, Life
Science and other areas of research as well as
industrial applications.
Material Science
- 1D / 2D materials
- Steel & metal alloys
- Batteries
- CeramicsPolymers & Composites
Semiconductors
- Integrated circuits
- Solar cells
- Failure analyses
- Dopant visualization
- Current leakage
- localization
Nanostructures
- Modified surfaces FIB/GIS
- Quantum dots
- Nanostructured films
- Nano-patterning
- Nanowires
Life Science
- Cell biology
- Marine biology
- Protein technology
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